Development of a novel optical alignment system for accurate leveling adjustment of a high-precision chip mounter [6280-121]
- Author(s):
- Publication title:
- Third International Symposium on Precision Mechanical Measurements
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6280
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 62803C
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819463517 [0819463515]
- Language:
- English
- Call no.:
- P63600/6280
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
A subpixel edge detection algorithm for the high precision automatic alignment system [6280-102]
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
A high precision weight measurement system based on chaotic theory [6280-142]
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
A three-dimensional precision platform based on vertical scanning and its application in surface topography measurement [6280-69]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Low-power grating detection system chip for high-speed low cost length and angle precision measurement [6280-04]
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Analysis for the characteristic of a four-quadrant photo-detector applied to a novel laser aligning system [6150-121]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Nonlinearity error separation and self-correction methods for time grating displacement sensor [6280-06]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Dynamic characteristics and testing techniques of microstructures under high load [6280-130]
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Study on installment and adjustment system of high precision optical synthetic aperture technology [6148-37]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |