Error separating and correcting method of nanometer two-dimensional working table [6280-101]

Error separating and correcting method of nanometer two-dimensional working table [6280-101]

Author(s):

Yang H. ( Hefei Univ. of Technology (China) and Anhui Univ. of Science and Technology (China) )
Fei Y.
Chen X.
Wang Q.
Jin F. ( Hefei Univ. of Technology (China) )

Publication title:

Third International Symposium on Precision Mechanical Measurements

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6280

Pub. Year:

2006

Pt.:

2

Page(from):

62802S

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819463517 [0819463515]

Language:

English

Call no.:

P63600/6280

Type:

Conference Proceedings

Details

TDL ID:	ZA00016287
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Precision Mechanical Measurements
Conf. info. (Number):	2006 : 3rd
Conf. info. (Venue):	Urumqi, Xinjiang, China
Conf. info. (Date):	2006.08.02-2008.08.06

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