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Improved throughput of deep high-aspect-ratio trenches using split-beam laser ablation [6261-84]

Author(s):
  • Braun, M. D. ( Hewlwtt-Packard Co. (USA) )
  • Gu, J. ( Hewlett Packard Singapore (Private) Ltd. (Singapore) )
  • Oram, J. R. ( Hewlwtt-Packard Co. (USA) )
Publication title:
High-Power Laser Ablation VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6261
Pub. Year:
2006
Pt.:
2
Page(from):
62612C
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463265 [0819463264]
Language:
English
Call no.:
P63600/6261
Type:
Conference Proceedings

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