Complex simulation of electron process of deep submicron MOSFET based on energy balance equation [6260-61]
- Author(s):
- Gergel, V. V. ( Institute for Radio-Engineering and Electronics (Russia) )
- Yakupov, N. M. ( JSC Mikron (Russia) )
- Publication title:
- Micro- and Nanoelectronics 2005
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6260
- Pub. Year:
- 2006
- Page(from):
- 62601O
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819463258 [0819463256]
- Language:
- English
- Call no.:
- P63600/6260
- Type:
- Conference Proceedings
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