The surface roughness investigation by the atomic force microscopy, x-ray scattering, and light scattering [6260-47]

The surface roughness investigation by the atomic force microscopy, x-ray scattering, and light scattering [6260-47]

Author(s):

Zanaveskin, L. M.

Grishchenko, V. Yu.

Tolstikhina, L. A.

Asadchikov, E. V.

Roshchin, S. B. ( Institute of Crystallography (Russia) )

Azarova, V. V. ( Polyus Research and Development Institute (Russia) )

1 more

Publication title:

Micro- and Nanoelectronics 2005

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6260

Pub. Year:

2006

Page(from):

62601A

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819463258 [0819463256]

Language:

English

Call no.:

P63600/6260

Type:

Conference Proceedings

Details

TDL ID:	ZA00016269
Series ID:	PA00000029
Conf. info. (Name):	ICMNE
Conf. info. (Number):	2005
Conf. info. (Venue):	Zvenigorod, Russia
Conf. info. (Date):	2005.10.03-2005.10.07

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