Development of two-dimensional scanning probe arrays for dip-pen nanolithography (DPN) [6223-23]

Development of two-dimensional scanning probe arrays for dip-pen nanolithography (DPN) [6223-23]

Author(s):

Zou J. ( Texas A&M Univ. (USA) )
Wang X. ( GE Global Research Ctr. (USA) )
Bullen D. ( Bettis Atomic Power Lab. (USA) )
Liu C. ( Univ. of Illinois at Urbana-Champaign (USA) )
Mirkin C. ( Northwestern Univ. (USA) )

Publication title:

Micro (MEMS) and nanotechnologies for space applications : 19-20 April 2006, Kissimmee, Florida, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6223

Pub. Year:

2006

Page(from):

62230N

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819462794 [0819462799]

Language:

English

Call no.:

P63600/6223

Type:

Conference Proceedings

Details

TDL ID:	ZA00016233
Series ID:	PA00000029
Conf. info. (Name):	Defense, Security, and Sensing : Micro (MEMS) and nanotechnologies for space applications
Conf. info. (Number):	2006
Conf. info. (Venue):	Kissimmee, FL, USA
Conf. info. (Date):	2006.04.19-2006.04.20

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