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Self-assembled polymer MEMS sensors and actuators (Invited Paper) [6172-30]

Author(s):
  • Hill A J ( NanoSonic, Inc. (USA) )
  • Claus, R. O. ( Virginia Polytechnic Institute and State Univ. (USA) and NanoSonic, Inc. (USA) )
  • Lalli J H ( NanoSonic, Inc. (USA) )
  • Homer M ( NanoSonic, Inc. (USA) )
Publication title:
Smart structures and materials 2006 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 27 February-1 March 2006, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6172
Pub. Year:
2006
Page(from):
61720U
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819462251 [081946225X]
Language:
English
Call no.:
P63600/6172
Type:
Conference Proceedings

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