Frequency tuning of film bulk acoustic resonators [6172-03]

Frequency tuning of film bulk acoustic resonators [6172-03]

Author(s):

Frederick, A. A. ( Univ. of Pittsburgh (USA) )
Hu, H.-H. ( Univ. of Pittsburgh (USA) )
Clark, W. W. ( Univ. of Pittsburgh (USA) )

Publication title:

Smart structures and materials 2006 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 27 February-1 March 2006, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6172

Pub. Year:

2006

Page(from):

617203

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819462251 [081946225X]

Language:

English

Call no.:

P63600/6172

Type:

Conference Proceedings

Details

TDL ID:	ZA00016203
Series ID:	PA00000029
Conf. info. (Name):	Smart structures and materials
Conf. info. (Number):	2006
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2006.02.27-2006.03.01

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