Blank Cover Image

244-nm imaging interferometric lithography test bed [6154-95]

Author(s):
  • Smolev, S. ( Ctr. for High Technology Materials, Univ of New Mexico (USA) )
  • Biswas, A. ( Ctr. for High Technology Materials, Univ of New Mexico (USA) )
  • Frauenglass, A. ( Ctr. for High Technology Materials, Univ of New Mexico (USA) )
  • Brueck, S. R. J. ( Ctr. for High Technology Materials, Univ of New Mexico (USA) )
Publication title:
Optical Microlithography XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6154
Pub. Year:
2006
Pt.:
2
Page(from):
61542K
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461971 [0819461970]
Language:
English
Call no.:
P63600/6154
Type:
Conference Proceedings

Similar Items:

Biswas, A.M., Frauenglass, A., Brueck, S.R.J.

SPIE - The International Society of Optical Engineering

Brueck,S.R.J.

SPIE - The International Society for Optical Engineering

Chen,X., Frauenglass,A., Brueck,S.R.J.

SPIE-The International Society for Optical Engineering

Chen,X., Brueck,S.R.J.

SPIE - The International Society for Optical Engineering

Raub, A. K., Biswas, A. M, Borodovsky, Y., Allen, G., Brueck, S. R. J.

SPIE - The International Society of Optical Engineering

Zaidi,S.H., Brueck,S.R.J., Schellenberg,F.M., Mackay,R.S., Uekert,K., Persoff,J.J.

SPIE-The International Society for Optical Engineering

Raub, A.K., Frauenglass, A., Brueck, S.R.J., Conley, W., Dammel, R.R., Romano, A., Sato, M., Hinsberg, W.

SPIE - The International Society of Optical Engineering

Wu, E.S., Santhanam, B., Brueck, S.R.J.

SPIE-The International Society for Optical Engineering

Brueck, S.R.J., Biswas, A.M.

SPIE - The International Society of Optical Engineering

Chen,X., Zhang,Z., Brueck,S.R.J., Carpio,R.A., Petersen,J.S.

SPIE-The International Society for Optical Engineering

Chen,X., Brueck,S.R.J.

SPIE-The International Society for Optical Engineering

Zaidi,S.H., Brueck,S.R.J.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12