Effects of laser bandwidth on OPE in a modern lithography tool [6154-36]

Effects of laser bandwidth on OPE in a modern lithography tool [6154-36]

Author(s):

Huggins, K. ( Intel Corp. (USA) )

Tsuyoshi, T. ( Nikon Corp. (Japan) )

Ong, M. ( Nikon Precision, Inc.(USA) )

Rafac, R. ( Cymer Inc. (USA) )

Treadway, C. ( Intel Corp. (USA) )

Choudhary, D. ( Intel Corp. (USA) )

Kudo, T. ( Nikon Corp. (Japan) )

Hirukawa, S. ( Nikon Corp. (Japan) )

Renwick, S. P. ( Nikon Precision, Inc. (USA) )

Farrar, N. R. ( Cymer Inc. (USA) )

5 more

Publication title:

Optical Microlithography XIX

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6154

Pub. Year:

2006

Pt.:

1

Page(from):

61540Z

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461971 [0819461970]

Language:

English

Call no.:

P63600/6154

Type:

Conference Proceedings

Details

TDL ID:	ZA00016186
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical Microlithography
Conf. info. (Number):	2006 : 19th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.02.21-2006.02.24

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