Aerial image based lens metrology for wafer steppers [6154-34]
- Author(s):
Dirksen, P. ( Philips Research Europe (Belgium) ) Braal, J. J. M. ( Delft Univ of Technology (Netherlands) ) Janssen, A. J. E. M. ( Philips Research Europe (Netherlands) ) Leeuwestein, A. ( Philips Research Europe (Netherlands) ) Matsuyama, T. ( Nikon Corp. (Japan) ) Noda, T. ( Nikon Corp. (Japan) ) - Publication title:
- Optical Microlithography XIX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6154
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 61540X
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461971 [0819461970]
- Language:
- English
- Call no.:
- P63600/6154
- Type:
- Conference Proceedings
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