Effect of azimuthally polarized illumination imaging on device patterns beyond 45-nm node [6154-12]
- Author(s):
Ozawa, K. ( Sony Corp. (Japan) ) Thunnakart, B ( Sony Corp. (Japan) ) Kaneguchi, T. ( Sony Corp. (Japan) ) Mita, I. ( Sony Corp. (Japan) ) Someya, A. ( Sony Corp. (Japan) ) Nakashima, T. ( Nikon Corp. (Japan) ) Mizuno, Y. ( Nikon Corp. (Japan) ) Matsuyama, T. ( Nikon Corp. (Japan) ) Hamatani, M. ( Nikon Corp. (Japan) ) - Publication title:
- Optical Microlithography XIX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6154
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 61540C
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461971 [0819461970]
- Language:
- English
- Call no.:
- P63600/6154
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
A new criterion of mask birefringence for polarized illumination [6349-194]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Alternating phase-shift mask and binary mask for 45-nm node and beyond: the impact on the mask error control
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Mask specifications for 45-nm node: the impact of immersion lithography and polarized light imaging [6283-78]
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Robust lithography process control methodology anticipating CD after etching using scatterometry below 65nm node
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Challenges for the quality control of assist features for 45nm node technology and beyond
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Patterning 45nm flash/DRAM contact hole mask with hyper-NA immersion lithography and optimized illumination [6154-60]
SPIE - The International Society of Optical Engineering |