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A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing [6153-175]

Author(s):
  • Tay, A. ( National Univ. of Singapore (Singapore) )
  • Chua, H.-I. ( Univ. of Western Australia (Australia) )
  • Wu, X. ( National Univ. of Singapore (Singapore) )
  • Wang, Y. ( National Univ. of Singapore (Singapore) )
Publication title:
Advances in Resist Technology and Processing XXIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6153
Pub. Year:
2006
Pt.:
2
Page(from):
61534M
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461964 [0819461962]
Language:
English
Call no.:
P63600/6153
Type:
Conference Proceedings

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