A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processing [6153-175]
- Author(s):
- Tay, A. ( National Univ. of Singapore (Singapore) )
- Chua, H.-I. ( Univ. of Western Australia (Australia) )
- Wu, X. ( National Univ. of Singapore (Singapore) )
- Wang, Y. ( National Univ. of Singapore (Singapore) )
- Publication title:
- Advances in Resist Technology and Processing XXIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6153
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 61534M
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461964 [0819461962]
- Language:
- English
- Call no.:
- P63600/6153
- Type:
- Conference Proceedings
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