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Implantation blocking characteristics study of organic BARC materials [6153-98]

Author(s):
Kim M.-S ( Hynix Semiconductor Inc. (South Korea) )
Seo J.-W ( Hynix Semiconductor Inc. (South Korea) )
Shim K.-C ( Hynix Semiconductor Inc. (South Korea) )
Jin, S.-W ( Hynix Semiconductor Inc. (South Korea) )
Kim H.-j ( Hynix Semiconductor Inc. (South Korea) )
Gil M.-G ( Hynix Semiconductor Inc. (South Korea) )
Song Y.-W ( Hynix Semiconductor Inc. (South Korea) )
2 more
Publication title:
Advances in Resist Technology and Processing XXIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6153
Pub. Year:
2006
Pt.:
2
Page(from):
61532N
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461964 [0819461962]
Language:
English
Call no.:
P63600/6153
Type:
Conference Proceedings

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