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Versatility in lithographic performance of advanced 193 nm contact hole resist [6153-86]

Author(s):
Kudo, T. ( AZ Electronic Materials USA Corp. (USA) )
Lin, G. ( AZ Electronic Materials USA Corp. (USA) )
Lee, D. ( AZ Electronic Materials USA Corp. (USA) )
Rahman, D. ( AZ Electronic Materials USA Corp. (USA) )
Timko, A. ( AZ Electronic Materials USA Corp. (USA) )
Mckenzie, D. ( AZ Electronic Materials USA Corp. (USA) )
Anyadiegwu, C. ( AZ Electronic Materials USA Corp. (USA) )
Chiu, S. ( AZ Electronic Materials USA Corp. (USA) )
Houlihan, F. ( AZ Electronic Materials USA Corp. (USA) )
Rentkiewicz, D. ( AZ Electronic Materials USA Corp. (USA) )
Dammel, R. R. ( AZ Electronic Materials USA Corp. (USA) )
Padmanaban, M. ( AZ Electronic Materials USA Corp. (USA) )
Biafore, J. ( KLA-Tencor Corp. (USA) )
8 more
Publication title:
Advances in Resist Technology and Processing XXIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6153
Pub. Year:
2006
Pt.:
2
Page(from):
61532C
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461964 [0819461962]
Language:
English
Call no.:
P63600/6153
Type:
Conference Proceedings

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