Negative-tone polyphenol resist based on chemically amplified polarity change reaction with sub-50-nm resolution capability [6153-16]
- Author(s):
Kojima, K ( Hitachi, Ltd (Japan) ) Hattori, T ( Hitachi, Ltd (Japan) ) Fukuda, H ( Hitachi, Ltd (Japan) ) Hirayama, T ( Tokyo Ohka Kogyo Co Ltd (Japan) ) Shiono D ( Tokyo Ohka Kogyo Co Ltd (Japan) ) Hada, H ( Tokyo Ohka Kogyo Co Ltd (Japan) ) Onodera, J ( Tokyo Ohka Kogyo Co Ltd (Japan) ) - Publication title:
- Advances in Resist Technology and Processing XXIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6153
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 61530G
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461964 [0819461962]
- Language:
- English
- Call no.:
- P63600/6153
- Type:
- Conference Proceedings
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