Development of the automatic recipe generation system for CD-SEM using design data [6152-191]

Development of the automatic recipe generation system for CD-SEM using design data [6152-191]

Author(s):

Matsuoka, R. ( Hitachi High-Technologies Corp. (Japan) )
Miyamoto, A. ( Hitachi Ltd. (Japan) )
Nagatomo, W ( Hitachi Ltd. (Japan) )
Morokuma, H. ( Hitachi High-Technologies Corp. (Japan) )
Sutani, T ( Hitachi High-Technologies Corp. (Japan) )

Publication title:

Metrology, Inspection, and Process Control for Microlithography XX

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6152

Pub. Year:

2006

Pt.:

2

Page(from):

61524N

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461957 [0819461954]

Language:

English

Call no.:

P63600/6152

Type:

Conference Proceedings

Details

TDL ID:	ZA00016184
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Metrology, Inspection, and Process Control for Microlithography
Conf. info. (Number):	2006 : 20th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.02.20-2006.02.23

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