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Leakage monitoring and control with an advanced e-beam inspection system [6152-170]

Author(s):
Liu, H. ( United Microelectronics Corp. (Taiwan) )
Yeh, J. H. ( United Microelectronics Corp. (Taiwan) )
Yang, C. L. ( United Microelectronics Corp. (Taiwan) )
Lei, S. C.
Kao, J. Y. ( United Microelectronics Corp. (Taiwan) )
Yang, Y. D. ( United Microelectronics Corp. (Taiwan) )
Tsai, M. ( United Microelectronics Corp. (Taiwan) )
Tzou, S. F ( United Microelectronics Corp. (Taiwan) )
Wu, W.-Y ( Hermes Systems (Taiwan) )
Wu, H.-C ( Hermes Sytems (Taiwan) )
Xiao, H. ( Hermes Microvision, Inc. USA (USA) )
Jau, J. ( Hermes Microvision, Inc. USA (USA) )
7 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. Year:
2006
Pt.:
2
Page(from):
615249
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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