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New OPC verification method using die-to-database inspection [6152-119]

Author(s):
Yang, H. ( Hynix Semiconductor Inc. (South Korea) )
Choi, J. ( Hynix Semiconductor Inc. (South Korea) )
Cho, B ( Hynix Semiconductor Inc. (South Korea) )
Hong, J. ( Hynix Semiconductor Inc. (South Korea) )
Song, J. ( Hynix Semiconductor Inc. (South Korea) )
Yim, D. ( Hynix Semiconductor Inc. (South Korea) )
Kim, J. ( Hynix Semiconductor Inc. (South Korea) )
Yamamoto. M. ( NanoGeometry Research Inc. (Japan) )
3 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. Year:
2006
Pt.:
2
Page(from):
615232
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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