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Characterizing optical proximity effect difference among exposure tools [6152-103]

Author(s):
Hong, J. ( Hynix Semiconductor Inc. (South Korea) )
Lee, J. ( Hynix Semiconductor Inc. (South Korea) )
Kang, E. ( Hynix Semiconductor Inc. (South Korea) )
Yang, H. ( Hynix Semiconductor Inc. (South Korea) )
Yim, D. ( Hynix Semiconductor Inc. (South Korea) )
Kim, J. ( Hynix Semiconductor Inc. (South Korea) )
1 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. date:
2006
Pt.:
2
Page(from):
61522N
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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