Printability study with polarisation capable AIMS fab 193i to study polarisation effects [6152-92]
- Author(s):
Zibold, A. ( Carl Zeiss SMS GmbH (Germany) ) Stroessner, U. ( Carl Zeiss SMS GmbH (Germany) ) Ridley, A. ( Carl Zeiss SMS GmbH (Germany) ) Scherubl, T. ( Carl Zeiss SMS GmbH (Germany) ) Rosenkranz, N. ( Carl Zeiss SMS GmbH (Germany) ) Harnisch, W. ( Carl Zeiss SMS GmbH (Germany) ) Poortinga, E. ( Carl Zeiss SMT Inc. (USA) ) Schmid, R. ( Carl Zeiss SMT Inc. (USA) ) Bekaert, J. ( IMEC (Belgium) ) Philipsen, V. ( IMEC (Belgium) ) Van Look, L. - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6152
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 61522F
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461957 [0819461954]
- Language:
- English
- Call no.:
- P63600/6152
- Type:
- Conference Proceedings
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