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Printability study with polarisation capable AIMS fab 193i to study polarisation effects [6152-92]

Author(s):
Zibold, A. ( Carl Zeiss SMS GmbH (Germany) )
Stroessner, U. ( Carl Zeiss SMS GmbH (Germany) )
Ridley, A. ( Carl Zeiss SMS GmbH (Germany) )
Scherubl, T. ( Carl Zeiss SMS GmbH (Germany) )
Rosenkranz, N. ( Carl Zeiss SMS GmbH (Germany) )
Harnisch, W. ( Carl Zeiss SMS GmbH (Germany) )
Poortinga, E. ( Carl Zeiss SMT Inc. (USA) )
Schmid, R. ( Carl Zeiss SMT Inc. (USA) )
Bekaert, J. ( IMEC (Belgium) )
Philipsen, V. ( IMEC (Belgium) )
Van Look, L.
6 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. Year:
2006
Pt.:
2
Page(from):
61522F
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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