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Compensating measured intra-wafer ring oscillator stage delay with intra-wafer exposure dose corrections [6152-71]

Author(s):
Verhaegen, S. ( IMEC (Belgium) )
Nackaerts, A. ( IMEC (Belgium) )
Dusa, M. ( ASML US Inc. (USA) )
Carpaij, R. ( ASML Netherlands B.V. (Netherlands) )
Vandenberghe, G. ( IMEC (Belgium) )
Finders, J. ( ASML Netherlands B.V. (Netherlands) )
1 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. date:
2006
Pt.:
1
Page(from):
61521Y
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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