Blank Cover Image

Product and tool control using integrated auto-macro defect inspection in the photolithography cluster [6152-65]

Author(s):
Menon, V. C. ( IBM Microelectronics (USA) )
Isaacson, R. L. ( IBM Microelectronics (USA) )
Nicholls, M. C. ( IBM Microelectronics (USA) )
Lickteig, S. J. ( Tokyo Electron )
Forstner, T. ( Tokyo Electron )
Barnett, A. R. ( Tokyo Electron )
Mulhall, J. ( Tokyo Electron )
2 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. Year:
2006
Pt.:
1
Page(from):
61521R
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

Similar Items:

Lickteig, S. J., Forstner, T. W., Barnett, A. R., Dixon, D. S., Menon, V. C., Isaacson, R. L., Nicholls, M. C., Liu, Y., …

SPIE - The International Society of Optical Engineering

Lei, M. T., Tang, K. H., Wang, Y. C., Huang, C. H., Jeng, C. C., Wang, L. K., Fang, W., Zhao, Y., Jau, J., Hsia, C. C.

SPIE - The International Society of Optical Engineering

SPIE - The International Society of Optical Engineering

Alvis,J.R., Satterfield,M.J., Gabella,P.

SPIE-The International Society for Optical Engineering

Carlson, A., Le, T.

SPIE - The International Society of Optical Engineering

Jarvis,R.W., Chua,C.

SPIE - The International Society for Optical Engineering

Hsu, R. H, Lin, B. S. M, Wu, W. Y, Xiao, H, Jau, J

SPIE - The International Society of Optical Engineering

Liu, H., Yeh, J. H., Yang, C. L., Lei, S. C., Kao, J. Y., Yang, Y. D., Tsai, M., Tzou, S. F, Wu, W.-Y, Wu, H.-C, Xiao, …

SPIE - The International Society of Optical Engineering

T. -Y. Kang, C. -H. Chen, C. -H. Ho, L. Hsu, Y. -C. Ku, K. Nakamura, H. Moribe, T. Bashomatsu, K. Matsumura, K. Hatta, …

SPIE - The International Society of Optical Engineering

Saito, M, Hayashi, T, Fujihara, K, Saito, K, Lin, J., Midorikawa, R.

SPIE - The International Society of Optical Engineering

Frystak, David C., Kuehne, John, Wise, Rick, Fowler, Burt, Grothe, Phil, Barnett, Joel, Miner, Gary

MRS - Materials Research Society

Risch,Carl J.

Society of Automotive Engineering, Inc.

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12