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Comprehensive approach to MuGFET metrology [6152-45]

Author(s):
Lorusso. G. F ( IMEC (Belgium) )
Leray, P. ( IMEC (Belgium) )
Vandeweyer, T. ( IMEC (Belgium) )
Ercken, M. ( IMEC (Belgium) )
Delvaux, C. ( IMEC (Belgium) )
Pollentier, I. ( IMEC (Belgium) )
Cheng, S. ( IMEC (Belgium) )
Collaert, N. ( IMEC (Belgium) )
Rooyackers, R. ( IMEC (Belgium) )
Degroote, B.
5 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
Pub. Year:
2006
Pt.:
1
Page(from):
615219
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461957 [0819461954]
Language:
English
Call no.:
P63600/6152
Type:
Conference Proceedings

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