Novel techniques for in-line acquisition of microstructure profiles [6152-44]

Novel techniques for in-line acquisition of microstructure profiles [6152-44]

Author(s):: Marchman, H. ( Photronics Inc. (USA) )
Publication title:: Metrology, Inspection, and Process Control for Microlithography XX
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 6152
Pub. Year:: 2006
Pt.:: 1
Page(from):: 615218
Pub. info.:: Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819461957 [0819461954]
Language:: English
Call no.:: P63600/6152
Type:: Conference Proceedings

Details

TDL ID:	ZA00016184
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Metrology, Inspection, and Process Control for Microlithography
Conf. info. (Number):	2006 : 20th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.02.20-2006.02.23

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