Metrology tool fleet management: applying FMP tool matching and monitoring concepts to an overlay fleet [6152-38]
- Author(s):
- Morningstar, J. ( IBM Systems and Technology Group (USA) )
- Solecky, E. ( IBM Systems and Technology Group (USA) )
- Archie, C. ( IBM Systems and Technology Group (USA) )
- Banke, B. ( IBM Systems and Technology Group (USA) )
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6152
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 615212
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461957 [0819461954]
- Language:
- English
- Call no.:
- P63600/6152
- Type:
- Conference Proceedings
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