Calibrating optical overlay measurements [6152-37]

Calibrating optical overlay measurements [6152-37]

Author(s):

Lipscomb, W. P. III ( International SEMATECH Manufacturing Initiative (USA) )

Allgair, J. A. ( International SEMATECH Manufacturing Initiative (USA) )

Bunday, B. D. ( International SEMATECH Manufacturing Initiative (USA) )

Bishop, M. R. ( International SEMATECH Manufacturing Initiative (USA) )

Silver, R. M. ( National Institute of Standards and Technology (USA) )

Attota, R. ( National Institute of Standards and Technology (USA) )

Stocker, M. D. ( National Institute of Standards and Technology (USA) )

2 more

Publication title:

Metrology, Inspection, and Process Control for Microlithography XX

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6152

Pub. Year:

2006

Pt.:

1

Page(from):

615211

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461957 [0819461954]

Language:

English

Call no.:

P63600/6152

Type:

Conference Proceedings

Details

TDL ID:	ZA00016184
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Metrology, Inspection, and Process Control for Microlithography
Conf. info. (Number):	2006 : 20th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.02.20-2006.02.23

Similar Items:

1 Conference Proceedings Litho-metrology challenges for the 45-nmtechnology node and beyond (Invited Paper) [6152-12] Allgair, J. A., Bunday, B. D., Bishop, M., Lipscomb, P., Orji, N. G. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Evaluation of new in-chip and arrayed line overlay target designs Attota, R., Silver, R.M., Bishop, M., Marx, E., Jun, J.-S.J., Stocker, M., Davidson, M.P., Larrabee, R.D. SPIE - The International Society of Optical Engineering
2 Conference Proceedings The limits of image-based optical metrology (Invited Paper) [6152-35] Silver, R. M., Barnes, B. M., Attota, R., Jun, J., Filliben, J., Soto, J., Stocker, M., Lipscomb, P., Marx, E., Patrick, … SPIE - The International Society of Optical Engineering	8 Conference Proceedings Determination of optimal parameters for CD-SEM measurement of line-edge roughness Bunday, B.D., Bishop, M., McCormack, D.W., Jr., Villarrubia, J.S., Vladar, A.E., Dixson, R., Vorburger, T.V., Orji, … SPIE - The International Society of Optical Engineering
3 Conference Proceedings High-resolution optical overlay metrology Silver, R.M., Attota, R., Stocker, M., Bishop, M., Jun, J.-S.J., Marx, E., Davidson, M.P., Larrabee, R.D. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Scatterfield microscopy using back focal plane imaging with an engineered illumination field [6152-19] Patrick, H. J., Attota, R., Barnes, B. M., Germer, T. A., Stocker, M. T., Silver, R. M., Bishop, M. R. SPIE - The International Society of Optical Engineering
4 Conference Proceedings Fundamental limits of optical critical dimension metrology: a simulation study R. Silver, T. Germer, R. Attota, B. M. Barnes, B. Bunday, J. Allgair, E. Marx, J. Jun SPIE - The International Society of Optical Engineering	10 Conference Proceedings Results of benchmarking of advanced CD-SEMs at the 90-nm CMOS technology node Bunday, B.D., Bishop, M., Allgair, J.A. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Calibration strategies for overlay and registration metrology Silver, R.M., Stocker, M.T., Attota, R., Bishop, M., Jun, J.-S.J., Marx, E., Davidson, M.P., Larrabee, R.D. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Optical critical dimension measurement and illumination analysis using the through-focus focus metric [6152-20] Attota, R., Silver, R. M., Bishop, M. R., Dixson, R. G. SPIE - The International Society of Optical Engineering
6 Conference Proceedings Automated CD-SEM recipe creation: a new paradigm in CD-SEM utilization [6152-47] Bunday, B., Lipscomb, W., Allgair, J., Yang, K., Koshihara, S., Morokuma, H., Page, L., Danilevsky, A. SPIE - The International Society of Optical Engineering	12 Conference Proceedings TEM calibration methods for critical dimension standards N. G. Orji, R. G. Dixson, D. I. Garcia-Gutierrez, B. D. Bunday, M. Bishop, M. W. Cresswell, R. A. Allen, J. A. Allgair SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12