Global pattern density effects on low-k trench CDs for sub-65-nm technology nodes [6152-05]
- Author(s):
Hsu, J. W. ( Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan) ) Shieh, J. H. ( Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan) ) Doong, K. Y. Y. ( Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan) ) Hung, L. J. ( Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan) ) Lin, S. C. ( Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan) ) Ting, C. Y. ( Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan) ) Jang, S. M. ( Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan) ) Young, K. L. ( Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan) ) Liang, M. S. ( Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan) ) - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6152
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 615205
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461957 [0819461954]
- Language:
- English
- Call no.:
- P63600/6152
- Type:
- Conference Proceedings
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