Blank Cover Image

UV -nanoimprint lithography using a diamond-like carbon stamp [6151-92]

Author(s):
Jeong, J. ( Korea Institute of Machinery and Materials (South Korea) )
Kim, K. ( Korea Institute of Machinery and Materials (South Korea) )
Sim, Y. ( Korea Institute of Machinery and Materials (South Korea) )
Choi, D. ( Korea Institute of Machinery and Materials (South Korea) )
Lee, E. ( Korea Institute of Machinery and Materials (South Korea) )
Park, S. ( Korea Advanced Institute of Science and Technology (South Korea) )
Lim, T. ( Korea Advanced Institute of Science and Technology (South Korea) )
Yang, D. ( Korea Advanced Institute of Science and Technology (South Korea) )
3 more
Publication title:
Emerging Lithographic Technologies X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6151
Pub. Year:
2006
Pt.:
2
Page(from):
61512J
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461940 [0819461946]
Language:
English
Call no.:
P63600/6151
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Nanofabrication of Diamond-Like Carbon Templates for Nanoimprint Lithography

L. Tao, S. Ramachandran, C. T. Nelson, L. J. Overzet, M. J. Goeckner, G. S. Lee, W. Hu

Materials Research Society
7 Conference Proceedings Application of nanoimprint lithography to nano-optics: wire grid polarizer and photonic crystal LED

K. Lee, S. Kim, J. Park, J. Kim, S. Park

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Ultra-violet nanoimprint lithography applicable to thin-film transistor liquid-crystal display

J. Jeong, K. Kim, D. Choi, J. Choi, E. Lee

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Accurate alignment technique for nanoimprint lithography

Kang, H.-B., Kim, J.-M., Kim, Y.-D., Cho, H.-J., Choi, S.-S.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Effect of Diamond-Like Carbon Overcoats on VOR Performance

Lee, J.-W, Kim, S.H., Park, Y.S., Shinn, M.N., Kang, D.H., Voon, S.Y, Kim, D.S., Park, T.S., Ha, S.H., Lee, J.-H., Kim, …

Electrochemical Society
9 Conference Proceedings Step and Repeat UV nanoimprint lithography tools and processes

McMackin, I., Choi, J., Schumaker, P., Nguyen, V., Xu, F., Thompson, E., Babbs, D., Sreenivasan, S.V., Watts, M., …

SPIE - The International Society of Optical Engineering
4 Conference Proceedings The role of stress in nanoimprint lithography [6151-43]

Ro, H. W., Ding, Y., Lee, H. J., Hines, D. R., Jones, R. L., Lin, E. K., Karim, A., Wu, W.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Double patterning in lithography for 65nm node with oxidation process

E. Jeong, J. Kim, K. Choi, M. Lee, D. Lee

Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Effects of pattern size, dual side patterning, and imprint materials in the fabrication of antireflective structure using nanoimprint

D.-G. Choi, K. J. Lee, K.-D. Kim, J.-H. Choi, J.-H. Jeong

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings High-yield catalytic synthesis of thin multiwalled carbon nanotubes and their field emission characteristics

Jeong, H. J., Lim, S.C., Lee, J. Y., Jung, K. T., Choi, Y., Lee, Y. H.

Electrochemical Society
6 Conference Proceedings Step and repeat UV-nanoimprint lithography using a large area stamp

Soumagne, G., Abe, T., Suganuma, T., Imai, Y., Someya, H., Hoshino, H., Nakano, M., Komori, H., Takabayashi, Y., Ariga, …

SPIE - The International Society of Optical Engineering
12 Conference Proceedings CD control at low K1 optical lithography in DRAM device

Hong, J., Woo, C., Park, J., Cho, B., Choi, J.-S., Yang, H., Park, C., Shin, Y.-C., Kim, Y., Jeong, G., Kim, J., Kang, …

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12