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Achieving mask-based imaging with optical maskless lithography [6151-87]

Author(s):
Stone, E. M. ( ASML (USA) )
Hintersteiner, J. D. ( ASML (USA) )
Cebuhar, W. A. ( ASML (USA) )
Albright, R. ( ASML (USA) )
Eib, N. K. ( LSI Logic Corp. (USA) )
Latypov, A. ( ASML (USA) )
Baba-Ali, N. ( ASML (USA) )
Poultney, S. K. ( ASML (USA) )
Croffie, E. H. ( LSI Logic Corp. (USA) )
4 more
Publication title:
Emerging Lithographic Technologies X
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6151
Pub. Year:
2006
Pt.:
2
Page(from):
61512E
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461940 [0819461946]
Language:
English
Call no.:
P63600/6151
Type:
Conference Proceedings

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