Numerical modeling of absorber characteristics for EUVl [6151-74]
- Author(s):
- Kong I. Y. ( Hanyang Univ. (South Korea) )
- Ahn J. ( Hanyang Univ. (South Korea) )
- Oh H. K. ( Hanyang Univ. (South Korea) )
- Chung Y. C. ( Hanyang Univ. (South Korea) )
- Publication title:
- Emerging Lithographic Technologies X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6151
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 615121
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461940 [0819461946]
- Language:
- English
- Call no.:
- P63600/6151
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Surface Characteristics of Ni-Diamond Composite Powders by Electroless Plating Method
Trans Tech Publications |
Society of Photo-optical Instrumentation Engineers |
8
Conference Proceedings
Optical characteristics of GaAs MSM photodetectors flip-chip bonded upon micromirrors using micromachined conductive polymer bumps
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
EUVl mask blanks: recent results on substrates, multilayers, and the dry-etch process of TaN-absorbers [6151-09]
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
EUV absorbance and dry-etching characteristics of TaGeN films for EUVL mask absorber
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Anticancer effect and cell cycle regulation of photodynamic therapy (PDT) using 9-hydroxypheophorbide-a and 660-nm diode laser
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
5
Conference Proceedings
SURFACE STABILITY AND FLOW CHARACTERISTICS OF BPSG FILM BY N2O PLASMA TREATMENT
Materials Research Society |
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
An in-situ FTIR Study on Palladium Displacement Reaction for Autocatalytic Electroless Copper Deposition
Electrochemical Society |
SPIE - The International Society for Optical Engineering |