Experiment and modeling of tilted mirror MEMS variable optical attenuator (Invited Paper) [6124-58]

Experiment and modeling of tilted mirror MEMS variable optical attenuator (Invited Paper) [6124-58]

Author(s):: He, C. ( AFOP. Inc.(USA) )
Publication title:: Optoelectronic Integrated Circuits VIII
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 6124
Pub. Year:: 2006
Page(from):: 61240H
Pub. info.:: Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819461667 [0819461660]
Language:: English
Call no.:: P63600/6124
Type:: Conference Proceedings

Details

TDL ID:	ZA00016158
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Optoelectronic Materials and Devices : Optoelectronic Integrated Circuits
Conf. info. (Number):	2006 : 8th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.01.23-2006.01.25

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