Laterally driven electrostatic actuators with extended travel range [6114-28]

Laterally driven electrostatic actuators with extended travel range [6114-28]

Author(s):

Su, J ( Univ. of Notre Dame (USA) )
Yang, H ( Univ. of Notre Dame (USA) )
Porod, W ( Univ. of Notre Dame (USA) )
Fay, P ( Univ. of Notre Dame (USA) )
Bernstein, G H ( Univ. of Notre Dame (USA) )

Publication title:

MOEMS Display, Imaging, and Miniaturized Microsystems IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6114

Pub. Year:

2006

Page(from):

61140P

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461568 [0819461563]

Language:

English

Call no.:

P63600/6114

Type:

Conference Proceedings

Details

TDL ID:	ZA00016148
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS Display, Imaging, and Miniaturized Microsystems
Conf. info. (Number):	2006 : 4th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.01.25-2006.01.26

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