Design, characterization, and control of a large aperture MOEMS Fabry-Perot tunable infrared filter [6114-18]

Author(s):

Palmer J A ( Sandia National Labs (USA) )

Hsieh W-T ( NASA Goddard Space Flight Ctr. (USA) )

Quijada M ( NASA Goddard Space Flight Ctr. (USA) )

Mott B ( NASA Goddard Space Flight Ctr. (USA) )

Akpan E ( NASA Goddard Space Flight Ctr. (USA) )

Brown G L ( NASA Goddard Space Flight Ctr. (USA) )

Jacobson M B Jr ( NASA Goddard Space Flight Ctr. (USA) )

Greenhouse M A ( NASA Goddard Space Flight Ctr. (USA) )

3 more

Publication title:

MOEMS Display, Imaging, and Miniaturized Microsystems IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6114

Pub. Year:

2006

Page(from):

61140G

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461568 [0819461563]

Language:

English

Call no.:

P63600/6114

Type:

Conference Proceedings