Large-scale nanolaminate deformable mirror [6113-26]
- Author(s):
- Papavasiliou, A. ( Lawrence Livermore National Lab. (USA) )
- Olivier, S. ( Lawrence Livermore National Lab. (USA) )
- Barbee, T. ( Lawrence Livermore National Lab. (USA) )
- Miles, R ( Lawrence Livermore National Lab. (USA) )
- Chang, K. ( MicroAssembly Technologies (USA) )
- Publication title:
- MEMS/MOEMS Components and Their Applications III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6113
- Pub. Year:
- 2006
- Page(from):
- 61130Q
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461551 [0819461555]
- Language:
- English
- Call no.:
- P63600/6113
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
High-performance adaptive optics using microscale assembly (Invited Paper) [6113-22]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror [6113-18]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Performance of flexure-hinged substrate-nanolaminate deformable mirror through modeling and simulation
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Large dynamic range wavefront control of micromachined deformable membrane mirrors
SPIE - The International Society of Optical Engineering |