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Characterization of contour shapes achievable with a MEMS deformable mirror [6113-17]

Author(s):
Publication title:
MEMS/MOEMS Components and Their Applications III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6113
Pub. Year:
2006
Page(from):
61130H
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461551 [0819461555]
Language:
English
Call no.:
P63600/6113
Type:
Conference Proceedings

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