Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator [6111-35]

Modeling and analysis of MEMS-based resonant sensor actuated by bent beam thermal actuator [6111-35]

Author(s):

Hassanpour, P. A. ( Univ. of Toronto (Canada) )
Cleghorn, W. L. ( Univ. of Toronto (Canada) )
Esmailzadeh, E. ( Univ. of Ontario Institute of Technology (Canada) )
Mills, J. K. ( Univ. of Toronto (Canada) )

Publication title:

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6111

Pub. Year:

2006

Page(from):

61110W

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461537 [0819461539]

Language:

English

Call no.:

P63600/6111

Type:

Conference Proceedings

Details

TDL ID:	ZA00016145
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS
Conf. info. (Number):	2006 : 5th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.01.25-2006.01.26

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