Experimental and computational study on laser heating of surface micromachined cantilevers [6111-09]

Experimental and computational study on laser heating of surface micromachined cantilevers [6111-09]

Author(s):

Phinney, L. M. ( Sandia National Labs (USA) )
Spahn. O. B. ( Sandia National Labs (USA) )
Wong, C. C. ( Sandia National Labs (USA) )

Publication title:

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6111

Pub. Year:

2006

Page(from):

611108

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461537 [0819461539]

Language:

English

Call no.:

P63600/6111

Type:

Conference Proceedings

Details

TDL ID:	ZA00016145
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS
Conf. info. (Number):	2006 : 5th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.01.25-2006.01.26

Similar Items:

1 Conference Proceedings Repair of stiction-failed surface-micromachined polycrystalline silicon cantilevers using pulsed lasers Phinney,L.M., Rogers,J.W. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Optimization of surface-micromachined patch antenna Wong,S., Ooi,B.L., Kooi,P.S., Ng,T.H., Liu,A.Q. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Surface characterization and adhesion analysis for polysilicon micromachined flaps Xue, X., Phinney, L.M. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Numerical and Experimental Research on Water-Jet Guided Laser Micromachining L.J. Yang, M.L. Wang, Y. Wang, J. Tang, Y.B. Chen Trans Tech Publications
3 Conference Proceedings Evaluation of Surface-Micromachined Pressure Sensors for Dynamic Pressure Applications Wayne M. Trott, C. Channy Wong, Donald B. Longcope American Society of Mechanical Engineers	9 Conference Proceedings Plasmon-induced heating effect in surface enhanced Raman scattering [6095-09] Kho, K.W., Shen, Z.X., Lei, Z., Watt, F., Soo, K.C., Olivo, M. SPIE - The International Society of Optical Engineering
4 Conference Proceedings Rapid prototyping of a micro pump with laser micromachining Wong,C.C., Chu,D., Liu,S.L., Tuck,M.R., Mahmud,Z., Amatucci,V. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Integration of DFB lasers with surface-micromachined wavelength-monitoring devices for WDM systems Lee,S.-S., Lin,L.-Y., Wu,M.C. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Investigation of adhesion during operation of MEMS cantilevers Ali, S.M., Phinney, L.M. SPIE - The International Society of Optical Engineering	11 Conference Proceedings THE STRUCTURE OF ALTERATION LAYERS ON CAST GLASS SURFACES Oversby, V.M., Phinney, D.L. Materials Research Society
6 Conference Proceedings Use of thermal cycling to reduce adhesion of OTS coated coated MEMS cantilevers Ali, S.M., Phinney, L.M. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Detailed Experimental Study of Mean and Gradient Stresses in Thin 3C-SiC Films Performed Using Micromachined Cantilevers S. Jiao, M. Zielinski, J.F. Michaud, T. Chassagne, M. Portail Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12