Technology development of mold fabrication for free-form surface, DOE, and microlens [6110-30]
- Author(s):
Owari, H. ( Nalux Co., Ltd. (Japan) ) Kawai, S. ( Nalux Co., Ltd. (Japan) ) Mukai, Y. ( Nalux Co., Ltd. (Japan) ) Terada, S. ( Nalux Co., Ltd. (Japan) ) Matsuo, T. ( Nalux Co., Ltd. (Japan) ) Seigo, M. ( Nalux Co., Ltd. (Japan) ) Yano, A ( Nalux Co., Ltd. (Japan) ) Imura, T ( Nalux Co., Ltd. (Japan) ) Emi, D ( Nalux Co., Ltd. (Japan) ) Kitagawa, S - Publication title:
- Micromachining technology for micro-optics and nano-optics IV : 23-25 January 2006, San Jose California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6110
- Pub. Year:
- 2006
- Page(from):
- 61100T
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461520 [0819461520]
- Language:
- English
- Call no.:
- P63600/6110
- Type:
- Conference Proceedings
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