Investigation of the III-V oxidation process for the fabrication of sub-micron three dimensional photonic devices [6110-25]
- Author(s):
Swaminathan, K. ( Univ. of Delaware (USA) ) Murakowski, J. ( Univ. of Delaware (USA) ) Schuetz, C. ( Univ. of Delaware (USA) ) Schneider, G. J. ( Univ. of Delaware (USA) ) Citla, B. S. ( Univ. of Delaware (USA) ) Prather, D. W. ( Univ. of Delaware (USA) ) - Publication title:
- Micromachining technology for micro-optics and nano-optics IV : 23-25 January 2006, San Jose California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6110
- Pub. Year:
- 2006
- Page(from):
- 61100P
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461520 [0819461520]
- Language:
- English
- Call no.:
- P63600/6110
- Type:
- Conference Proceedings
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