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Optical module fabrication using nanoimprint technology [6110-21]

Author(s):
Publication title:
Micromachining technology for micro-optics and nano-optics IV : 23-25 January 2006, San Jose California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6110
Pub. Year:
2006
Page(from):
61100L
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461520 [0819461520]
Language:
English
Call no.:
P63600/6110
Type:
Conference Proceedings

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