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Combined low-coherence interferometry and spectrally resolved reflectometry for nondestructive characterization of small-diameter high-aspect ratio micro-fabricated and micro-machined structures and multilayer membranes [6109-21]

Author(s):
Publication title:
Micromachining and Microfabrication Process Technology XI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6109
Pub. Year:
2006
Page(from):
61090J
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461513 [0819461512]
Language:
English
Call no.:
P63600/6109
Type:
Conference Proceedings

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