High aspect ratio plasma etching of bulk lead zirconate titanate [6109-15]

High aspect ratio plasma etching of bulk lead zirconate titanate [6109-15]

Author(s):

Subasinghe, S. S. ( Penn State Univ. (USA) )
Goyal, A. ( Penn State Univ. (USA) )
Tadigadapa, S. A. ( Penn State Univ. (USA) )

Publication title:

Micromachining and Microfabrication Process Technology XI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6109

Pub. Year:

2006

Page(from):

61090D

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461513 [0819461512]

Language:

English

Call no.:

P63600/6109

Type:

Conference Proceedings

Details

TDL ID:	ZA00016143
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining and Microfabrication Process Technology
Conf. info. (Number):	2005 : 11th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.25

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