High-sensitivity 2.5-um pixel CMOS image sensor realized using Cu interconnect layers [6068-11]

High-sensitivity 2.5-um pixel CMOS image sensor realized using Cu interconnect layers [6068-11]

Author(s):

Tatani, K. ( Sony Corp. (Japan) )

Enomoto, Y. ( Sony Corp. (Japan) )

Yamamoto, A. ( Sony Corp. (Japan) )

Goto, T. ( Sony Corp. (Japan) )

Abe, H. ( Sony Corp. (Japan) )

Hirayama, T. ( Sony Corp. (Japan) )

1 more

Publication title:

Sensors, Cameras, and Systems for Scientific/Industrial Applications VII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6068

Pub. Year:

2006

Page(from):

606809

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461087 [0819461083]

Language:

English

Call no.:

P63600/6068

Type:

Conference Proceedings

Details

TDL ID:	ZA00016102
Series ID:	PA00000029
Conf. info. (Name):	IS&T/SPIE Electronic Imaging : Sensors, Cameras, and Systems for Scientific/Industrial Applications
Conf. info. (Number):	2006 : 7th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2006.01.17-2006.01.19

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