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Interdigitated single crytal piezoelectric actuator [6048-24]

Author(s):
Publication title:
Optomechatronic actuators and manipulation : 5-7 December 2005, Sapporo, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6048
Pub. Year:
2005
Page(from):
60480K
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460844 [0819460842]
Language:
English
Call no.:
P63600/6048
Type:
Conference Proceedings

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