Research on terminal behavior of electrostatically actuated micropump membrane based on modal analysis [6040-30]
- Author(s):
- Publication title:
- ICMIT 2005: mechatronics, MEMS, and smart materials : 20-23 September 2005, Changchun, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6040
- Pub. Year:
- 2005
- Page(from):
- 60400U
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460721 [0819460729]
- Language:
- English
- Call no.:
- P63600/6040
- Type:
- Conference Proceedings
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