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Microchannel fabrication in PMMA based on localized heating using high-repetition rate femtosecond pulses [6037-04]

Author(s):
  • Day D.
  • Gu M. ( Swinburne Univ. of Technology (Australia) )
Publication title:
Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6037
Pub. date:
2006
Page(from):
603704
Page(to):
603704
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460684 [0819460680]
Language:
English
Call no.:
P63600/6037
Type:
Conference Proceedings

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