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Modeling and analysis of fringing and metal thikness effects in MEMS parallel plate capacitors [6035-37]

Author(s):
Publication title:
Microelectronics: Design, Technology, and Packaging II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6035
Pub. Year:
2006
Page(from):
603511
Page(to):
603511
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460660 [0819460664]
Language:
English
Call no.:
P63600/6035
Type:
Conference Proceedings

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