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Current Research activities in the field of multilayer for EUV, soft x-ray and x-rays in IPOE [6034-13]

Author(s):
Wang Z.
Wang F
Zhang Z.
Wang H.
Wu W.
Zhang S.
Gu Z.
Cheng X.
Wang B.
Qin S.
Chen L. ( Tongji Univ. (China) )
6 more
Publication title:
ICO20: optical design and fabrication : 21-26 August 2005, Changchun, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6034
Pub. date:
2006
Page(from):
60340D
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460653 [0819460656]
Language:
English
Call no.:
P63600/6034
Type:
Conference Proceedings

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