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System-level modeling of segmented deformable micromirror using multi-port-element network method [6032-18]

Author(s):
  • He, Y.
  • Jiang, C.
  • Yuan, W. ( Northwestern Polytechnical Univ. (China) )
  • Huo, P. ( Northwestern Polytechnical Univ. (China) and Xi’an Institute of Electromechanical Information Technology (China) )
  • Ma, B. ( Northwestern Polytechnical Univ. (China) )
Publication title:
ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6032
Pub. Year:
2006
Page(from):
60320I
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460639 [081946063X]
Language:
English
Call no.:
P63600/6032
Type:
Conference Proceedings

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